Overview

Vulcan Technology is a high-tech enterprise focusing on the development and production of high-end thermal field materials.

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Product: Carbon fiber soft felt Carbon fibre composite rigid felts (long and short) C/C Composite structural materials High purity graphite High performance coating materials Other

Application: Compound semiconductors (substrates) Compound semiconductor (epitaxial) Silicon-based semiconductor Photovoltaic monocrystalline silicon Photovoltaic cell Optical communication Industrial Furnaces & Various Furnace Types Hydrogen energy storage & Flow battery

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Home>Product>Carbon fibre composite rigid felts (long and short)>Epitaxial Felt

Epitaxial Felt

● Designed specifically for SiC epitaxial process, unique assembly structure, high resistivity, avoids sparking
● Has good thermal insulation performance

优点

: Specially designed for SiC epitaxial process, unique assembly structure, high resistivity, avoid sparking

: Has good thermal insulation performance

Performance Indicators

Performance Indicators		Units	VU-LHF-HV02

Density		g/cm³	0.15-0.17
Carbon Content		wt	>99.9
Heat-Treatment Temperature		℃	2400
Average Thermal Conductivity 1000℃		W/（m·K）	0.2
Ash Content		ppm	<20
Compressive Strength	Face Direction（5%）	Mpa	0.25
	Two-sided Direction		1.56
Bending Strength	Face Direction	Mpa	0.35
	Two-sided Direction		1.2
Electrical Resistivity	Face Direction	Ω.m	6.9*10^-3
	Two-sided Direction		7.6*10^-4
Usage Environment	Air	℃	400
	Vacuum		2400
	Inert Gas		3200

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